Progressive Design and Assessment of MEMS-Based Devices for Healthcare and Computer Science Applications
DOI:
https://doi.org/10.48047/aebmg574Keywords:
Micro-Electro-Mechanical System, Healthcare, Environmental Monitoring, Multiphysics, Comsol, Sensors.Abstract
Microelectromechanical Systems (MEMS) transformed healthcare and computer science
by making possible miniaturized, high-performance, low-cost devices. In this paper, the design
methodologies and evaluation frameworks employed in these fields are discussed, with emphasis
placed on primary design principles, fabrication, performance metrics, and new applications. MEMS
technology has made advances in healthcare, including implantable biosensors,
wearable medical monitors, microfluidics, and surgical robots. In computer science, MEMS is applied to
microprocessors, accelerometers, data storage, optical computing, and security systems.
Performance evaluation entails determining reliability, durability, sensitivity, accuracy, power usage, and
scalability. Trends in the future are self-powered MEMS devices, AI-based diagnostics, and quantum
MEMS for high-level computing applications.
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